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Four-Terminal Measurement and Simulations for Sheet Resistance in Piezoresistive Sensing Elements
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: We have seen some wafers rejected with abnormally large within-wafer variation for the input resistance (Rin) of the X-ducer in the pressure sensing element. Input resistance consists of p+,p−, ...
Humidity-Induced Voltage Shift on MEMS Pressure Sensors
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: The pressure sensor is one of the major applications of microelectromechanical systems (MEMS). An absolute pressure sensor utilizes anodic bonding to create a vacuum cavity between the silicon ...